The course is designed to provide students with fundamental knowledge of Microelectromechanical Systems (MEMS). Topics covered include: Introduction to MEMS; fabrication technology and commercial processes; analysis, modeling and design of MEMS actuators; analysis, modelling and design of MEMS sensors; optical MEMS design and applications; RF MEMS design and applications; BioMEMS devices; and introduction to MEMS design, modelling and simulation software.